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    Title :

    SOI Type Pressure Sensor for High Temperature Pressure Measurement


    Contributors:
    Hase, Y. (author) / Bessho, M. (author) / Ipposhi, T. (author) / SAE

    Conference:

    Sessions; International congress, Sensors and actuators 1994 ; 1994 ; Detroit; MI



    Publication date :

    1994-01-01


    Size :

    6 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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