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    Title :

    A stiffness model for control and analysis of a MEMS hexapod nanopositioner




    Publication date :

    2014



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    50.25 Robotertechnik / 52.20 Antriebstechnik, Getriebelehre / 50.32 Dynamik, Schwingungslehre



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