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    Title :

    Sensorless damping control of a high speed flexure guided nanopositioner


    Additional title:

    Sensorlose Steuerung der Daempfung eines durch schnelle Biegung gefuehrten Nanopositionierers.



    Publication date :

    2014


    Size :

    6 pages


    Remarks:

    19th World Congress International Federation of Automatic Control,IFAC; 2014


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English




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