Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
Solar energy materials & solar cells ; 96 , 1
2012
Article (Journal)
English
Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
Online Contents | 2012
|SHORT COMMUNICATION: Surface passivation by rehydrogenation of silicon-nitride-coated silicon wafers
Online Contents | 2005
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