Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride
Solar energy materials & solar cells ; 65 , 1-4
2001
Article (Journal)
English
Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride
Online Contents | 2002
|Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride
Online Contents | 2015
|Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
Online Contents | 2012
|