Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
2012
Article (Journal)
English
Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
Online Contents | 2012
|SHORT COMMUNICATION: Surface passivation by rehydrogenation of silicon-nitride-coated silicon wafers
Online Contents | 2005
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