Widths and spacings of conductor lines on integrated circuits measured electrically by split cross-bridge resistor technique. Speeds evaluation of integrated-circuit fabrication processes. When measurement of probe currents and voltages and reduction of measurement data automated, test structure probed and characterized in less than one second.
Measuring Conductor Widths and Spacings Electrically
NASA Tech Briefs ; 11 , 7
1987-07-01
Miscellaneous
No indication
English
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