Widths and spacings of conductor lines on integrated circuits measured electrically by split cross-bridge resistor technique. Speeds evaluation of integrated-circuit fabrication processes. When measurement of probe currents and voltages and reduction of measurement data automated, test structure probed and characterized in less than one second.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Measuring Conductor Widths and Spacings Electrically


    Contributors:

    Published in:

    Publication date :

    1987-07-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




    METHOD OF MANUFACTURING AN ELECTRICALLY INSULATED CONDUCTOR

    WOLFGANG REINPRECHT / MARIAGRAZIA MONTARULI / FRITZ HARING | European Patent Office | 2023

    Free access

    Intervehicle Spacings and Queue Characteristics

    Long, Gary | Transportation Research Record | 2002


    Bus spacings and ground clearances

    Engineering Index Backfile | 1932



    Picking device adaptable to different row spacings

    ZHENG HANG / YU GUOHONG / WU MENG et al. | European Patent Office | 2020

    Free access