Widths and spacings of conductor lines on integrated circuits measured electrically by split cross-bridge resistor technique. Speeds evaluation of integrated-circuit fabrication processes. When measurement of probe currents and voltages and reduction of measurement data automated, test structure probed and characterized in less than one second.
Measuring Conductor Widths and Spacings Electrically
NASA Tech Briefs ; 11 , 7
01.07.1987
Sonstige
Keine Angabe
Englisch
METHOD OF MANUFACTURING AN ELECTRICALLY INSULATED CONDUCTOR
Europäisches Patentamt | 2023
|Intervehicle Spacings and Queue Characteristics
Transportation Research Record | 2002
|Bus spacings and ground clearances
Engineering Index Backfile | 1932
Measuring the Conductor Spacing in Flat Conductor Cables
NTIS | 1969
|