Widths and spacings of conductor lines on integrated circuits measured electrically by split cross-bridge resistor technique. Speeds evaluation of integrated-circuit fabrication processes. When measurement of probe currents and voltages and reduction of measurement data automated, test structure probed and characterized in less than one second.


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    Titel :

    Measuring Conductor Widths and Spacings Electrically


    Beteiligte:

    Erschienen in:

    Erscheinungsdatum :

    1987-07-01



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch




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