Molten-silicon pool receives fine silicon powder and melts it. After stable molten layer forms, pedestal is lowered at rate equal to siliconpowder feed rate. If silane is directly decomposed on silicon pool, powder feeder is replaced by jet of silane on silicon surface, and hydrogen produced in decomposition of solane is pumped from bottom end of chamber.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Consolidating Submicron Silicon Particles


    Contributors:

    Published in:

    Publication date :

    1983-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


    Submicron Silicon MOSFET

    Daud, T. | NTRS | 1986


    Consolidating Lunar Regolith

    Cayden Doyle / Sheila A Thibeault / Jin Ho Kang et al. | NTRS


    Consolidating Lunar Regolith

    C. Doyle / S. A. Thibeault / J. H. Kang et al. | NTIS | 2021


    Consolidating thin wing

    Engineering Index Backfile | 1940


    CPM enables sizing of submicron particles

    Barden, R. / Peters, R. | British Library Online Contents | 2002