Molten-silicon pool receives fine silicon powder and melts it. After stable molten layer forms, pedestal is lowered at rate equal to siliconpowder feed rate. If silane is directly decomposed on silicon pool, powder feeder is replaced by jet of silane on silicon surface, and hydrogen produced in decomposition of solane is pumped from bottom end of chamber.
Consolidating Submicron Silicon Particles
NASA Tech Briefs ; 7 , 1
1983-03-01
Miscellaneous
No indication
English
NTRS | 1986
|NTRS
|NTIS | 2021
|Engineering Index Backfile | 1940
CPM enables sizing of submicron particles
British Library Online Contents | 2002
|