Molten-silicon pool receives fine silicon powder and melts it. After stable molten layer forms, pedestal is lowered at rate equal to siliconpowder feed rate. If silane is directly decomposed on silicon pool, powder feeder is replaced by jet of silane on silicon surface, and hydrogen produced in decomposition of solane is pumped from bottom end of chamber.


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    Titel :

    Consolidating Submicron Silicon Particles


    Beteiligte:
    Yamakawa, K. A. (Autor:in) / Lutwack, R. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.03.1983



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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