Device for cathodic sputtering utilizes cathode dark-space region adjacent to high negative-potential surfaces. Feedthrough is made of metal and glass, is helium leaktight, and is bakeable; it can be incorporated into any vacuum apparatus.


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    Title :

    Ultra-high-vacuum electrical feedthrough


    Contributors:

    Published in:

    Publication date :

    1976-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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