Device for cathodic sputtering utilizes cathode dark-space region adjacent to high negative-potential surfaces. Feedthrough is made of metal and glass, is helium leaktight, and is bakeable; it can be incorporated into any vacuum apparatus.
Ultra-high-vacuum electrical feedthrough
NASA Tech Briefs ; 1 , 1
01.03.1976
Sonstige
Keine Angabe
Englisch
Low partial discharge vacuum feedthrough
NTRS | 1979
|ELECTRICAL MULTI-CONNECTOR FEEDTHROUGH PANEL AND METHOD THEREFOR
Europäisches Patentamt | 2019
|