Chemical etching for automatic processing of integrated circuits is discussed. The wafer carrier and loading from a receiving air track into automatic furnaces and unloading onto a sending air track are included.


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    Title :

    Chemical Etching for Automatic Processing of Integrated Circuits


    Contributors:

    Publication date :

    1981


    Size :

    20 pages


    Type of media :

    Report


    Type of material :

    No indication


    Language :

    English




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