A technique for monolithic integration of silica-based waveguides and optoelectronic components has been developed. The low temperature fabrication budget necessary to preserve the optoelectronic devices is obtained through the use the hollow cathode plasma enhanced CVD technique.


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    Title :

    Techniques for monolithic integration of silica-based waveguide devices with optoelectronics


    Contributors:
    Bazylenko, M. (author) / Gross, M. (author) / Gauja, E. (author) / Pak Lim Chu (author)


    Publication date :

    1998-01-01


    Size :

    276921 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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