A technique for monolithic integration of silica-based waveguides and optoelectronic components has been developed. The low temperature fabrication budget necessary to preserve the optoelectronic devices is obtained through the use the hollow cathode plasma enhanced CVD technique.


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    Titel :

    Techniques for monolithic integration of silica-based waveguide devices with optoelectronics


    Beteiligte:
    Bazylenko, M. (Autor:in) / Gross, M. (Autor:in) / Gauja, E. (Autor:in) / Pak Lim Chu (Autor:in)


    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    276921 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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