We have proposed and developed "terahertz ellipsometry" in which ellipsometry is applied to time-domain spectroscopy in the THz frequency region. In this paper, the complex optical constants of highly doped semiconductors obtained by terahertz ellipsometry are shown. In addition, the incident angle dependence of the measurement precision is discussed.
Measurement of complex optical constant using terahertz ellipsometry
2002-01-01
121269 byte
Conference paper
Electronic Resource
English
Measurement of Complex Optical Constant Using Terahertz Ellipsometry
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