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    Title :

    Evaluation of complex optical constants of semiconductor wafers using terahertz ellipsometry


    Contributors:
    Nagashima, T. (author) / Hangyo, M. (author)


    Publication date :

    2003-01-01


    Size :

    127229 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    Measurement of Complex Optical Constant Using Terahertz Ellipsometry

    Nagashima, T. / Hangyo, M. | British Library Conference Proceedings | 2002



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