Monolithic Microwave IC (MMIC) is on low-resistivity silicon that mostly would bring line attenuation and deteriorate of circuit quality because of substrare extremely high dielectric loss. There has been a great demand for low-loss and low-cost substrate. Porous silicon (PS) has been proved as a promiseful substrate material for CPW, MEMS switch, and so on high frequency applications.


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    Title :

    The Technology of Porous Silicon Substrate in Radio Frequency/Microwave circuits


    Contributors:
    Guo, F. (author) / Liu, Y. (author) / Zhang, L. (author) / Zhang, Y. (author) / Kong, J. (author) / Zhu, S. (author) / Zhu, Z. (author)


    Publication date :

    2006-09-01


    Size :

    1087924 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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