Monolithic Microwave IC (MMIC) is on low-resistivity silicon that mostly would bring line attenuation and deteriorate of circuit quality because of substrare extremely high dielectric loss. There has been a great demand for low-loss and low-cost substrate. Porous silicon (PS) has been proved as a promiseful substrate material for CPW, MEMS switch, and so on high frequency applications.


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    Titel :

    The Technology of Porous Silicon Substrate in Radio Frequency/Microwave circuits


    Beteiligte:
    Guo, F. (Autor:in) / Liu, Y. (Autor:in) / Zhang, L. (Autor:in) / Zhang, Y. (Autor:in) / Kong, J. (Autor:in) / Zhu, S. (Autor:in) / Zhu, Z. (Autor:in)


    Erscheinungsdatum :

    01.09.2006


    Format / Umfang :

    1087924 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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