Monolithic Microwave IC (MMIC) is on low-resistivity silicon that mostly would bring line attenuation and deteriorate of circuit quality because of substrare extremely high dielectric loss. There has been a great demand for low-loss and low-cost substrate. Porous silicon (PS) has been proved as a promiseful substrate material for CPW, MEMS switch, and so on high frequency applications.
The Technology of Porous Silicon Substrate in Radio Frequency/Microwave circuits
01.09.2006
1087924 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Optoelectronics silicon on insulator integrated circuits by porous silicon technology [4430-98]
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