It is difficult to acquire the actual mechanical parameters of comb-finger MEMS devices, for its sensing element has special structure. In order to derive the parameters, such as the proof mass m, the equivalent distance d/sub 0/ between fingers, and the mechanical stiffness k/sub m/, a static electrometric method is investigated. The method includes two experiments, the electrostatic force experiment and the open loop frequency response experiment, and the values of d/sub 0/, d/sub 0/, and k/sub m/ can be calculated with the electrical variables in the experiments. The experimental results show that the actual mechanical parameters of the sensing element can be estimated with a high accuracy. It is a convenient and useful method to be used in the fieldwork without the special requirement of environment and costly facilities.


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    Title :

    An electrometric method to measure the mechanical parameters of MEMS devices


    Contributors:
    Li Jiang, (author) / Gao Zhongyu, (author) / Dong Jingxin, (author)


    Publication date :

    2002-01-01


    Size :

    209697 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    An Electrometric Method to Measure the Mechanical Parameters of MEMS Devices

    Li, J. / Zhongyu, G. / Dong, J. et al. | British Library Conference Proceedings | 2002





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