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    Title :

    An Electrometric Method to Measure the Mechanical Parameters of MEMS Devices


    Contributors:
    Li, J. (author) / Zhongyu, G. (author) / Dong, J. (author) / Gal, M. / IEEE

    Conference:

    Conference, Optoelectronic and microelectronic materials and devices; COMMAD 2002 ; 2002 ; Sydney, Australia



    Publication date :

    2002-01-01


    Size :

    4 pages


    Remarks:

    IEEE cat no 02EX601




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English