A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R2-nonlinearity is 0.008% within the range of ±43°/s, which is limited by the digital to analogue converter, with a scale factor of 42.17mV/°/s. The scale factor is reduced to 7.4mV/°/s to perform linear test within a larger range, and the R2-nonlinearity is 0.032% within ±200°/s. The bias stability is 19.55°/h and the measured noise floor is 0.0125°/s/√Hz at 1Hz.


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    Title :

    Performance characterization of a bulk micromachined gyroscope working at atmosphere


    Contributors:
    Xia Zhang, (author) / Xu-dong Zheng, (author) / Shi-chang Hu, (author) / Hao Wang, (author) / Zhong-he Jin, (author)


    Publication date :

    2010-06-01


    Size :

    810591 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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