A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R2-nonlinearity is 0.008% within the range of ±43°/s, which is limited by the digital to analogue converter, with a scale factor of 42.17mV/°/s. The scale factor is reduced to 7.4mV/°/s to perform linear test within a larger range, and the R2-nonlinearity is 0.032% within ±200°/s. The bias stability is 19.55°/h and the measured noise floor is 0.0125°/s/√Hz at 1Hz.
Performance characterization of a bulk micromachined gyroscope working at atmosphere
01.06.2010
810591 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Micromachined resonant gyroscope [5253-26]
British Library Conference Proceedings | 2003
|A New Micromachined Gyroscope with Digital Output
British Library Conference Proceedings | 2003
|A new micromachined gyroscope with digital output
Tema Archiv | 2003
|Effects of environmental temperature on the performance of a micromachined gyroscope
British Library Online Contents | 2008
|