A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R2-nonlinearity is 0.008% within the range of ±43°/s, which is limited by the digital to analogue converter, with a scale factor of 42.17mV/°/s. The scale factor is reduced to 7.4mV/°/s to perform linear test within a larger range, and the R2-nonlinearity is 0.032% within ±200°/s. The bias stability is 19.55°/h and the measured noise floor is 0.0125°/s/√Hz at 1Hz.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Performance characterization of a bulk micromachined gyroscope working at atmosphere


    Beteiligte:
    Xia Zhang, (Autor:in) / Xu-dong Zheng, (Autor:in) / Shi-chang Hu, (Autor:in) / Hao Wang, (Autor:in) / Zhong-he Jin, (Autor:in)


    Erscheinungsdatum :

    01.06.2010


    Format / Umfang :

    810591 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Micromachined resonant gyroscope [5253-26]

    Qiu, A. / Wang, S. / Zhou, B. et al. | British Library Conference Proceedings | 2003


    A New Micromachined Gyroscope with Digital Output

    Lang, M. / Grossmann, M. / Prutz, O. et al. | British Library Conference Proceedings | 2003


    A new micromachined gyroscope with digital output

    Lang, M. / Großmann, M. / Prütz, O. et al. | Tema Archiv | 2003



    Effects of environmental temperature on the performance of a micromachined gyroscope

    Liu, G. / Wang, A. / Jiang, T. et al. | British Library Online Contents | 2008