This paper reports on a novel micromachined angular rate sensor with optimised mechanical suspension targeted for automotive applications. The eigenfrequencies and the mode shapes of the sensor element were calculated both analytically and by using finite element method simulations. Furthermore, the Q-factors of the drive and sense frequencies were determined experimentally as a function of ambient pressure levels in a custom-built set-up. The sensitivity of the sensor element was measured in the range of up to 1000 deg/s applying different excitation voltages and the corresponding quadrature errors were determined.


    Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Investigation on the pressure-dependent performance of a surface micromachined gyroscope


    Contributors:
    Kulygin, A. (author) / Schmid, U. (author) / Seidel, H. (author)


    Publication date :

    2007


    Size :

    4 Seiten, 6 Quellen



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Micromachined resonant gyroscope [5253-26]

    Qiu, A. / Wang, S. / Zhou, B. et al. | British Library Conference Proceedings | 2003


    Performance characterization of a bulk micromachined gyroscope working at atmosphere

    Xia Zhang, / Xu-dong Zheng, / Shi-chang Hu, et al. | IEEE | 2010


    A New Micromachined Gyroscope with Digital Output

    Lang, M. / Grossmann, M. / Prutz, O. et al. | British Library Conference Proceedings | 2003


    A new micromachined gyroscope with digital output

    Lang, M. / Großmann, M. / Prütz, O. et al. | Tema Archive | 2003


    Effects of environmental temperature on the performance of a micromachined gyroscope

    Liu, G. / Wang, A. / Jiang, T. et al. | British Library Online Contents | 2008