There are a number of different ways to achieve tunability. Among these, MEMS technology offers a new approach to mechanically adjust the lasing cavity length to select the output wavelength. In this work, we report on the fabrication of a tunable Fabry-Perot filter based on the consideration of process and material compatibility when this filter structure is to be fabricated directly onto the VCSEL wafers as a tunable laser.
Study of micromachined tunable filter and its potential application to tunable laser
2001-01-01
119507 byte
Conference paper
Electronic Resource
English
Study of Micromachined Tunable Filter and Its Potential Application to Tunable Laser
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