We designed a new tunable filter with a top DBR structure of Al/sub 2/O/sub 3//GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter.


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    Title :

    Widely tunable micromachined optical filter with adjustable tuning characteristics


    Contributors:


    Publication date :

    2001-01-01


    Size :

    173794 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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