We designed a new tunable filter with a top DBR structure of Al/sub 2/O/sub 3//GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter.
Widely tunable micromachined optical filter with adjustable tuning characteristics
01.01.2001
173794 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
TuU4 Widely Tunable Micromachined Optical Filter with Adjustable Tuning Characteristics
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