We present some tuning characteristics of a GaAlAs/GaAs micromachined tunable filter with a thermal strain control layer and heating element integrated on a top surface. We present the design of micromachined filters for a wide tuning range and for fast wavelength tuning. Experimentally, we demonstrate the fast tuning response with rise time and fall time of below 100 /spl mu/s.
Dynamic response of thermally tunable micromachined optical filter with low tuning voltage
The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; 2 ; 829-830 vol.2
2002-01-01
237613 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
ThV4 Dynamic Response of Thermally Tunable Micromachined Optical Filter with Low Tuning Voltage
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