There are a number of different ways to achieve tunability. Among these, MEMS technology offers a new approach to mechanically adjust the lasing cavity length to select the output wavelength. In this work, we report on the fabrication of a tunable Fabry-Perot filter based on the consideration of process and material compatibility when this filter structure is to be fabricated directly onto the VCSEL wafers as a tunable laser.


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    Titel :

    Study of micromachined tunable filter and its potential application to tunable laser


    Beteiligte:
    Chou, B.C.S. (Autor:in) / Lin, W.T. (Autor:in) / Chiou, J.C. (Autor:in)


    Erscheinungsdatum :

    01.01.2001


    Format / Umfang :

    119507 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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