High quality three-dimensional micro-and nano-structures were fabricated in photoresist SU-8 by two-photon laser lithography. Extended periodic microstructures with so-called woodpile architecture are demonstrated to have good quality and exhibit fundamental and higher-order photonic stop-gaps in the infrared wavelength range of 2.0-8.0 µm. These SU-8 structures can be used as photonic crystal templates suitable for infiltration by high refractive index materials. To illustrate the resolution limit of SU-8 material, we also demonstrate fabrication of SU-8 nanorods with ultrahigh resolution of about 30 nm.


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    Title :

    Two-Photon Laser Lithography of photonic microstructures in photoresist SU-8


    Contributors:
    Mizeikis, V. (author) / Seet, K.-K. (author) / Juodkazis, S. (author) / Jarutis, V. (author) / Misawa, H. (author)


    Publication date :

    2005-01-01


    Size :

    233190 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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