Summary form only given, as follows. Micro-structuring of glass has been examined using UV radiation. The etch depth profile has been investigated. The limitations and possibilities for micro-structuring on glass has been found for the wavelengths of 193nm, 248nm and 308nm.


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    Title :

    Micro-machining of glass by excimer laser ablation


    Contributors:


    Publication date :

    1998-01-01


    Size :

    49679 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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