Summary form only given, as follows. Micro-structuring of glass has been examined using UV radiation. The etch depth profile has been investigated. The limitations and possibilities for micro-structuring on glass has been found for the wavelengths of 193nm, 248nm and 308nm.
Micro-machining of glass by excimer laser ablation
1998-01-01
49679 byte
Conference paper
Electronic Resource
English
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