Summary form only given, as follows. Micro-structuring of glass has been examined using UV radiation. The etch depth profile has been investigated. The limitations and possibilities for micro-structuring on glass has been found for the wavelengths of 193nm, 248nm and 308nm.


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    Titel :

    Micro-machining of glass by excimer laser ablation


    Beteiligte:
    von Alvensleben, F. (Autor:in) / Graumann, C. (Autor:in) / Wais, J.W. (Autor:in)


    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    49679 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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