We demonstrate that excimer laser ablation can be applied successfully to fabricate microlenses and arrays of microlenses in an easy set-up allowing great flexibility in terms of size, shape and focal length of the lenses. Due to the non-contact and direct-write nature of the process, the technique allows easy insertion of micro-optics in a late phase of a heterogeneous optoelectronic assembly.
Excimer laser ablation based microlens fabrication in polymer materials
The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; 2 ; 655-656 vol.2
2002-01-01
152470 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
ThD3 Excimer Laser Ablation Based Microlens Fabrication in Polymer Materials
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