We demonstrate that excimer laser ablation can be applied successfully to fabricate microlenses and arrays of microlenses in an easy set-up allowing great flexibility in terms of size, shape and focal length of the lenses. Due to the non-contact and direct-write nature of the process, the technique allows easy insertion of micro-optics in a late phase of a heterogeneous optoelectronic assembly.


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    Titel :

    Excimer laser ablation based microlens fabrication in polymer materials


    Beteiligte:
    Naessens, K. (Autor:in) / Van Daele, P. (Autor:in) / Baets, R. (Autor:in)


    Erscheinungsdatum :

    2002-01-01


    Format / Umfang :

    152470 byte





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    ThD3 Excimer Laser Ablation Based Microlens Fabrication in Polymer Materials

    IEEE | British Library Conference Proceedings | 2002


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