To prepare the In/sub 2/O/sub 3/ and ITO films without heat treatment, we have studied the metal acetylacetonate coating photolysis process using an ArF excimer laser. In this paper, we will report the experimental procedures and our results.


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    Title :

    Preparation of In/sub 2/O/sub 3/ and ITO films using coating photolysis process with ArF excimer laser


    Contributors:
    Tsuchiya, T. (author) / Watanabe, A. (author) / Niino, H. (author) / Yabe, A. (author) / Yamaguchi, I. (author) / Manabe, T. (author) / Kumagai, T. (author) / Mizuta, S. (author)


    Publication date :

    2001-01-01


    Size :

    128099 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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