To prepare the In/sub 2/O/sub 3/ and ITO films without heat treatment, we have studied the metal acetylacetonate coating photolysis process using an ArF excimer laser. In this paper, we will report the experimental procedures and our results.


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    Titel :

    Preparation of In/sub 2/O/sub 3/ and ITO films using coating photolysis process with ArF excimer laser


    Beteiligte:
    Tsuchiya, T. (Autor:in) / Watanabe, A. (Autor:in) / Niino, H. (Autor:in) / Yabe, A. (Autor:in) / Yamaguchi, I. (Autor:in) / Manabe, T. (Autor:in) / Kumagai, T. (Autor:in) / Mizuta, S. (Autor:in)


    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    128099 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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