To prepare the In/sub 2/O/sub 3/ and ITO films without heat treatment, we have studied the metal acetylacetonate coating photolysis process using an ArF excimer laser. In this paper, we will report the experimental procedures and our results.
Preparation of In/sub 2/O/sub 3/ and ITO films using coating photolysis process with ArF excimer laser
2001-01-01
128099 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
British Library Conference Proceedings | 2000
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