50 fs pulse laser micromachining of sapphire has been demonstrated. The smooth and clean features and high ablation rate have proven the suitability of this technique for micro-scale machining of this technologically important material.
Femtosecond laser micromachining of sapphire
2001-01-01
170475 byte
Conference paper
Electronic Resource
English
ThM3 Femtosecond Laser Micromachining of Sapphire
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