Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8 kHz (Q=26.5) have been measured in air and mass detection of 510 fg/100 Hz is possible.
Micromechanical resonators with integrated optical waveguides for sensing applications
(CLEO). Conference on Lasers and Electro-Optics, 2005. ; 1 ; 761-763 Vol. 1
2005-01-01
1708351 byte
Conference paper
Electronic Resource
English
Micromechanical Resonators with Integrated Optical Waveguides for Sensing Applications
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