Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8 kHz (Q=26.5) have been measured in air and mass detection of 510 fg/100 Hz is possible.


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    Title :

    Micromechanical resonators with integrated optical waveguides for sensing applications


    Contributors:


    Publication date :

    2005-01-01


    Size :

    1708351 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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