Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8 kHz (Q=26.5) have been measured in air and mass detection of 510 fg/100 Hz is possible.


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    Titel :

    Micromechanical resonators with integrated optical waveguides for sensing applications


    Beteiligte:
    Pruessner, M.W. (Autor:in) / Chuang, W.-H. (Autor:in) / Amarnath, K. (Autor:in) / Kanakaraju, S. (Autor:in) / Ghodssi, R. (Autor:in)


    Erscheinungsdatum :

    01.01.2005


    Format / Umfang :

    1708351 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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