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    Titel :

    Sensors formed with optical waveguides and micromechanical structures on silicon


    Beteiligte:
    Boyd, Joseph (Autor:in) / De Brabander, N. (Autor:in) / Burcham, E. (Autor:in) / Beheim, Glenn (Autor:in)

    Kongress:

    30th Joint Propulsion Conference and Exhibit ; 1994 ; Indianapolis , IN , U.S.A.



    Erscheinungsdatum :

    1994-01-01



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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