Sensors formed with optical waveguides and micromechanical structures on silicon
30th Joint Propulsion Conference and Exhibit ; 1994 ; Indianapolis , IN , U.S.A.
1994-01-01
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
SAE Technical Papers | 1994
|British Library Conference Proceedings | 1994
|Micromechanical cantilever directs waveguides
British Library Online Contents | 1999
Micromechanical Resonators with Integrated Optical Waveguides for Sensing Applications
British Library Conference Proceedings | 2005
|