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    Title :

    Sensors formed with optical waveguides and micromechanical structures on silicon


    Contributors:

    Conference:

    30th Joint Propulsion Conference and Exhibit ; 1994 ; Indianapolis , IN , U.S.A.



    Publication date :

    1994-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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