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    Titel :

    Optical Fiber Coupled Sensors Integrating Optical Waveguides and Micromechanical Structures on Silicon


    Beteiligte:

    Kongress:

    Aerospace Atlantic conference ; 1994 ; Dayton; OH



    Erscheinungsdatum :

    01.01.1994


    Format / Umfang :

    ALL


    Anmerkungen:

    Separate papers nos 941141 to 941222 with gaps held only



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch


    Schlagwörter :


    Optical Fiber Coupled Sensors Integrating Optical Waveguides and Micromechanical Structures on Silicon

    Beheim, Glenn / De Brabander, Gregory N. / Boyd, Joseph T. et al. | SAE Technical Papers | 1994


    Sensors formed with optical waveguides and micromechanical structures on silicon

    Boyd, Joseph / De Brabander, N. / Burcham, E. et al. | AIAA | 1994


    Sensors Formed with Optical Waveguides and Micromechanical Structures on Silicon

    Boyd, J. T. / De Brabander, G. N. / Burcham, K. E. et al. | British Library Conference Proceedings | 1994


    Micromechanical resonators with integrated optical waveguides for sensing applications

    Pruessner, M.W. / Chuang, W.-H. / Amarnath, K. et al. | IEEE | 2005


    Micromechanical Resonators with Integrated Optical Waveguides for Sensing Applications

    Pruessner, M. | British Library Conference Proceedings | 2005