This paper presents SF6/O2plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.


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    Title :

    Low Temperature Molding for High Space Coverage Microlens Arrays


    Contributors:
    Wang, K. (author) / Bohringer, K.F. (author)


    Publication date :

    2005-01-01


    Size :

    245459 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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