This paper presents SF6/O2plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
Low Temperature Molding for High Space Coverage Microlens Arrays
2005-01-01
245459 byte
Conference paper
Electronic Resource
English
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