The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.


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    Title :

    Design for reliability of MEMS/MOEMS for lightwave telecommunications


    Contributors:
    Shea, H.R. (author) / Arney, S. (author) / Gasparyan, A. (author) / Haueis, M. (author) / Aksyuk, V.A. (author) / Bolle, C.A. (author) / Frahm, R.E. (author) / Goyal, S. (author) / Pardo, F. (author) / Simon, M.E. (author)


    Publication date :

    2002-01-01


    Size :

    166127 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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