The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.
Design for reliability of MEMS/MOEMS for lightwave telecommunications
The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; 2 ; 418-419 vol.2
2002-01-01
166127 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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