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    Title :

    Design, test, integration and packaging of MEMS/MOEMS, 2005


    Contributors:
    Courtois, B. (author) / Michel, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 891


    Publication date :

    2006-01-01


    Size :

    891 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Design, Test, Integration and Packaging of MEMS/MOEMS, 2004

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    Foreword to special issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2008

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