We present full-wafer loss data for ridge waveguides for three different geometries fabricated on 150 mm silicon-on-insulator wafers. Full-wafer testing was made possible by a vertically coupled, automated test system.


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    Title :

    Full-wafer loss measurements of silicon ridge waveguides


    Contributors:
    Gould, M. (author) / Jing Li, (author) / Baehr-Jones, T. (author) / Hochberg, M. (author)


    Publication date :

    2011-09-01


    Size :

    2009445 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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