We present full-wafer loss data for ridge waveguides for three different geometries fabricated on 150 mm silicon-on-insulator wafers. Full-wafer testing was made possible by a vertically coupled, automated test system.


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    Titel :

    Full-wafer loss measurements of silicon ridge waveguides


    Beteiligte:
    Gould, M. (Autor:in) / Jing Li, (Autor:in) / Baehr-Jones, T. (Autor:in) / Hochberg, M. (Autor:in)


    Erscheinungsdatum :

    01.09.2011


    Format / Umfang :

    2009445 byte





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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