Small periodic grating structures were dry-etched with superior vertically and high aspect ratio. These structures were then applied to demonstrate stable single mode and low threshold operation on high index contrast laser devices.


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    Title :

    1.5-/spl mu/m-wavelength single mode semiconductor lasers with deeply etched vertical grating


    Contributors:
    Arai, S. (author) / Kim, H.-C. (author) / Kanjo, H. (author)


    Publication date :

    2004-01-01


    Size :

    230760 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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