Small periodic grating structures were dry-etched with superior vertically and high aspect ratio. These structures were then applied to demonstrate stable single mode and low threshold operation on high index contrast laser devices.
1.5-/spl mu/m-wavelength single mode semiconductor lasers with deeply etched vertical grating
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 1 ; 2 pp. vol.1
2004-01-01
230760 byte
Conference paper
Electronic Resource
English
British Library Conference Proceedings | 2001
|British Library Conference Proceedings | 2001
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