Small periodic grating structures were dry-etched with superior vertically and high aspect ratio. These structures were then applied to demonstrate stable single mode and low threshold operation on high index contrast laser devices.


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    Titel :

    1.5-/spl mu/m-wavelength single mode semiconductor lasers with deeply etched vertical grating


    Beteiligte:
    Arai, S. (Autor:in) / Kim, H.-C. (Autor:in) / Kanjo, H. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    230760 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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