We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.
High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 2 ; 3 pp. vol.2
2004-01-01
329835 byte
Conference paper
Electronic Resource
English
Femtosecond laser micromachining of sapphire
IEEE | 2001
|ThM3 Femtosecond Laser Micromachining of Sapphire
British Library Conference Proceedings | 2001
|Industrial Applications of Pulsed Laser Micromachining
IEEE | 1998
|Micromachining with a frequency-converted diode-pumped Nd:YAG laser [4088-42]
British Library Conference Proceedings | 2000
|British Library Conference Proceedings | 2000
|