We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications


    Contributors:


    Publication date :

    2004-01-01


    Size :

    329835 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Femtosecond laser micromachining of sapphire

    Kim, K.-S. / Jones, D. / Bente, E. et al. | IEEE | 2001


    ThM3 Femtosecond Laser Micromachining of Sapphire

    IEEE | British Library Conference Proceedings | 2001



    Micromachining with a frequency-converted diode-pumped Nd:YAG laser [4088-42]

    Hartke, K. / King, K. / Farson, D. F. et al. | British Library Conference Proceedings | 2000


    High-power second harmonic generation with free-running Nd:YAG slab laser for micromachining applications [4088-35]

    Favre, S. / Sidler, T. C. / Salathe, R.-P. et al. | British Library Conference Proceedings | 2000